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Influence of substrate temperature on structural and optical properties of RF sputtered ZnMnO thin films

Pashaei Parisa^1,2, Akin Nihan^1,2, Ceren Baskose U.^1,2, Kemal Ozturk M.^1,2, Cakmak Mehmet^1,2, Ozcelik Suleyman^1,2

¹Photonics Application and Research Center, Gazi University, Ankara, Turkey
²Department of Physics, Gazi University, Ankara, Turkey

Поступила в редакцию: 11 сентября 2014 г.

Выставление онлайн: 20 мая 2015 г.

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The ZnMnO thin films were deposited on glass substrates by radio frequency magnetron sputtering method. The properties of ZnMnO thin films were investigated by high-resolution x-ray diffractometer (HRXRD), atomic force microscopy (AFM), UV-Vis spectrometer and room temperature photoluminescence (PL), under the influence of substrate temperature. The substrate temperature was varied from 300, 400 and 500^oC. With increasing the substrate temperature, the structure of the films changed from cubicto hexagonal. The cubic ZnMnO thin films grown along [210] direction, while the hexagonal ones grown along [002] direction. The changes in surface morphology provided a proof on the structural transition. Also, decrease and increase of optical band gap is associated with cubic or hexagonal structure of the films.

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