ФТП, 2007, том 41, выпуск 4

 Содержание  Предыдущая статья  Следующая статья  Поиск  

In-depth resolution for LBIC technique by two-photon absorption

D.Wan, V.Pouget\kern1pt, A.Douin, P.Jaulent, D.Lewis, P.Fouillat

IXL, Microelectronics Lab., University Bordeaux 1,
33405 Talence, France

(Получена 12 сентября 2006 г. Принята к печати 3 октября 2006 г.)

A detailed study on the in-depth dependence of the laser beam induced current (LBIC) technique by the sub-bandgap two-photon absorption (TPA) has been carried out in this paper. The strong focal dependence mechanism for TPA has been demonstrated by our studies through comparing TPA technique with the traditional single-photon absorption based ones. Dependence of the TPA induced single-event transient response in linear integrated circuits on depth and position is investigated. Our results illustrate an interesting in-depth resolution for TPA technique, which enables three-dimensional imaging of charge collecting volumes through the backside of integrated of integrated circuits.

PACS: 63.20.-e, 78.40.Fy, 78.67.De, 85.30.De, 85.35.Be

 PDF версия (480Kb)   Другие выпуски  Другие журналы   Помощь 
Copyright (C) 2007, Коллектив авторов  Разработано...  webmaster