Plasma chemical deposition of hydrogenated DLC films with different hydrogen and sp3-hybrid carbon content
Okhapkin A. I. 1, Drozdov M. N.1, Yunin P. A.1, Kraev S. A.1, Radishev D. B.2
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
2Federal Research Center A.V. Gaponov-Grekhov Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia
Email: poa89@ipmras.ru
The influence of methane plasma parameters on the deposition rate and on the content of the hydrogen and the sp3-carbon fraction in hydrogenated diamond-like carbon films (DLC) was investigated. It was shown that the proportion of the sp3-carbon fraction mainly depends on the inductive power and the argon addition to the plasma; the latter also contributes to a decrease of hydrogen in the films. Keywords: diamond-like carbon, plasma chemical deposition, sp2-, sp3-hybridization, Raman spectroscopy, secondary-ion mass spectrometry.
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