Multilayer sensor structure based on porous silicon
Bolotov V. V. 1, Knyazev E. V. 1, Ponomareva I. V. 1, Ivlev K. E. 1
1Omsk Scientific Center, Siberian Branch, Russian Academy of Sciences, Omsk, Russia
Email: knyazev@obisp.oscsbras.ru.

PDF
The work is devoted to the creation of a sensor structure based on a porous silicon membrane. The structure under study integrates a porous layer used as a gas transport layer and a gas sensitive layer of non-stoichiometric tin oxide. The paper investigates the morphology of the structure and shows the gas permeability of the membrane on porous silicon. The gas sensitivity of the test structure obtained by passing a gas-air mixture containing NO2 has been studied. Keywords: porous silicon, membrane, non-stoichiometric tin oxide, thin films, resistive gas sensor.
  1. M.H. Kareem, A.M. Abdul Hussein, H. Talib Hussein. J. Mech. Behav. Mater., 30, 257 (2021)
  2. G.O. Silakov, O.V. Volovlikova, S.A. Gavrilov, A.V. Zheleznyakova, A.A. Dudin. FTP, 54, 743 (2020) (in Russian)
  3. S.V. Malokhatko, E.Yu. Gusev, E.A. Rassolov, A.M. Khannanov, O.A. Ageev. J. Phys.: Conf. Ser., 1695, 012183 (2020)
  4. E.M. Loginova, D.A. Shishkina, M.A. Zhuravleva. J. Phys.: Conf. Ser., 2086, 012114 (2021)
  5. H. Hagino, S. Tanaka, N. Tanimura, K. Miyazaki. Int. J. Thermophys., 36, 2548 (2015)
  6. I.-N. Bratosin, P. Varasteanu, C. Romanitan, A. Bujor, O. Tutunaru, A. Radoi, M. Kusko. J. Phys. Chem. C, 125 (11), 6043 (2021)
  7. Y. Li, N.V. Toan, Zh. Wang, Kh. Fadzli Bin Samat, T. Ono. Nanoscale Res. Lett., 16, 64 (2021)
  8. J.H. Bang, M.S. Choi, A. Mirzaei, W. Oum, S. Han, S.S. Kim, H.W. Kim. Ceramics International, 46, 604 (2020)
  9. S. Mariani, A. Paghi, A.A. La Mattina, A. Debrassi, L. Dahne, G. Barillaro. ACS Appl. Mater. Interfaces, 11, 43731 (2019)
  10. O.V. Lebedeva, E.I. Sipkina, Yu.N. Pozhidayev. Membrany i membrannye tekhnologii, 6, 138 (2016) (in Russian)
  11. R. Vercauteren, G. Scheen, J.-P. Raskin, L.A. Francis. Sensors Actuators A, 318, 112486 (2021)
  12. N. Andre, B. Rue, G. Scheen, D. Flandre, L.A. Francis, J.-P. Raskin. Sensors Actuators A, 206, 67 (2014)
  13. V.V. Bolotov, V.E. Roslikov, E.A. Roslikova, K.E. Ivlev, V.E. Knyazev, N.A. Davletkildeyev. FTP, 48 (3), 412 (2014) (in Russian)

Подсчитывается количество просмотров абстрактов ("html" на диаграммах) и полных версий статей ("pdf"). Просмотры с одинаковых IP-адресов засчитываются, если происходят с интервалом не менее 2-х часов.

Дата начала обработки статистических данных - 27 января 2016 г.

Publisher:

Ioffe Institute

Institute Officers:

Director: Sergei V. Ivanov

Contact us:

26 Polytekhnicheskaya, Saint Petersburg 194021, Russian Federation
Fax: +7 (812) 297 1017
Phone: +7 (812) 297 2245
E-mail: post@mail.ioffe.ru