Smirnov M.B.1, Grigorieva N.R.1, Pankin D.V.1, Roginskii E.M.2, Savin A.V.2
1St. Petersburg State University, St. Petersburg, Russia
2Ioffe Institute, St. Petersburg, Russia
Email: n.r.grigorieva@spbu.ru
A study was carried out of the dielectric properties of planar Si/SiO2 heterostructures, which play an important role in modern electronics. Using the model of dielectric continuum, the spectra of polar phonons in Si/SiO2 binary superlattices have been studied. Quartz and cristobalite lattices are considered as a structural model of the oxide layer. The dependences of polar optical phonons frequencies and the high-frequency dielectric constant tensor elements on the ratio of layer thicknesses were obtained. The results obtained open up the possibility of using spectroscopic data to characterize the structure of superlattices. Keywords: oxide-semiconductor heterostructures, superlattices, computer modelling, dielectric continuum model, vibrational spectra.
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