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Solubility of magnesium in silicon
The solubility of impurity magnesium, which was introduced by diffusion in the temperature range of 1100-1300oC in silicon, is studied by secondary-ion mass spectrometry. It is demonstrated that, with the electrically inactive impurity component taken into account, the maximum solubility of magnesium in silicon is 1-2 orders of magnitude lower (and the diffusion coefficient is higher) than the values reported earlier. Keywords: silicon, doping, magnesium impurity, solubility.
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