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Synthesis of MgAl2O4 thin films by Al and Mg anodic evaporation in a low-pressure arc (Ar/O2, 1 Pa)
Gavrilov N. V.
1, Emlin D. R.
1, Medvedev A.I.
1
1Institute of Electrophysics of the Ural Branch of the Russian Academy of Sciences, Yekaterinburg, Russia
Email: gavrilov@iep.uran.ru, erd@iep.uran.ru, a.i.medvedev@mail.ru
Films of magnesium aluminate spinel were synthesized by reactive anodic evaporation of Al and Mg in a low-pressure arc (Ar/O2, 1 Pa) with vapor condensation at low temperature (~ 400oC). Film deposition was assisted by ion flux 25-100 eV, 1-2 mA/cm2) with a significant content of metal ions. Cubic spinel films had a strong texture (100) and microstrains of the crystal lattice are of ~ 1%. The deposition rate of films was 1-3 μm/h at controlling of a relative content of Al and Mg atoms within 1.2-2.4. Keywords: anodic evaporation, ionic assistance, magnesium aluminate spinel, self-heating cathode, thin films.
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