Technical Physics Letters
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- 2023
- 2022
Surface modification and preservation of bulk properties of piezoelectric ceramics under the exposure to hydrogen plasma flow.
Sotnikova G. Yu.
1, Voronin A. V.
1, Goryainov V. Yu.
1, Zaitseva N. V.
1, Klimov V. N.
2, Nashchekin A. V.
1, Passet R. S.
1, Sotnikov Andrei V.
1
1Ioffe Institute, St. Petersburg, Russia
2National Research Center "Kurchatov Institute" - CRISM "Prometey", St.Petersburg, Russia
2National Research Center "Kurchatov Institute" - CRISM "Prometey", St.Petersburg, Russia
Email: g.sotnikova@mail.ioffe.ru, voronin.mhd@mail.ioffe.ru, vgoryainov@mail.ioffe.ru, nvz47@yandex.ru, ais-berg87@mail.ru, nashchekin@mail.ioffe.ru, rostislav.passet@mail.ru, andrew.sotnikov2014@yandex.ru
Experimental results of pulsed hydrogen plasma impact on piezoelectric ceramics on the example of domestic composition CTSNV-1 are presented. Significant changes in the elemental composition and surface topography were revealed with a characteristic depth of the modified layer of the order of 20 μm. The study of piezoelectric properties of CTSNV-1 after exposure to hydrogen plasma (integral particle flux to ~ 1023 m-2, energy ~ 100 eV) showed a decrease in the electromechanical coupling coefficient of the thickness mode kt samples (from ~ 0.6 to ~ 0.3) while keeping the piezoelectric constant values d33 within 450± 50 pm/V and dielectric constant ε33 within 2250± 560, which corresponds to the manufacturer's data on the spread of these values for standard samples. Keywords: piezoelectric ceramics, hydrogen plasma, surface morphology, piezoelectric constant, electromechanical coupling coefficient.
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