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The effect of magnetron sputtering conditions during deposition of (BaSrCa)CO3 coatings on thermionic emission of film microcathodes
ZhabinG.A.
1, Pelipets O. V.1, Sharapov N. A. 1
1JSC "RPC "Istok" named after Shokin", Fryazino, Moscow oblast, Russia
Email: zhabingennady@yandex.ru
The effect of temperature and discharge power of ion-plasma deposition of molecular sputter-deposited oxide microcathodes (MSOC) on their emission activity has been experimentally investigated. The elemental composition of a thin coating of MSOC has been studied using Auge electron spectroscopy (AES) and X-ray fluorescence analysis (XRF). The effect of the atmosphere and residual gases on the operation of microcathodes is shown. Keywords: molecular sputter-deposited oxide microcathode (MSOC), emission characteristics, durability, work function, electrovacuum device (EVD).
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