Probe methods of diagnostics of parameters of induction-coupled plasma maintained in a volatile halide gas mix
Preobrazhensky E. I.
1, Sintsov S. V.
1,2, Vodopyanov A. V.
1,2
1Federal Research Center A.V. Gaponov-Grekhov Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia
2Lobachevsky University of Nizhny Novgorod, Nizhny Novgorod, Russia
Email: evgenypr@ipfran.ru
In this paper, the results of the measurement of the local electron energy distribution function in an induction-coupled plasma discharge maintained in a flow of volatile halides at low-pressure are presented. A moveable electric probe with a short exposure time in plasma was used, which significantly reduces the erosive effect of the chemical active medium on the electrodes. Numerical methods of processing volt-ampere characteristics are discussed, which make it possible to identify the features of the electron energy distribution function in a high-energy region.. Keywords: plasma, electrical probes, halides, plasma chemistry.
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