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Formation of inhomogeneous oxide and suboxide layers on an ultra-thin metal film by multiple oxidation and ion sputtering
Lubenchenko A. V.
1, Ivanov D. A.1, Lubenchenko O. I.1, Pavolotsky A.B.2, Lukiantsev D. S.1, Iachuk V. A.1, Pavlov O. N.1
1National Research University "MPEI", Moscow, Russia
2Chalmers University of Technology, Goteborg, Sweden
2Chalmers University of Technology, Goteborg, Sweden
Email: lubenchenkoav@mpei.ru
A technique of controlled formation of multilayer oxide and suboxide layers on a thin metal film. An opportunity of controlled generation of films containing an ultra-thin suboxide layer inside a higher oxide layer and films being a periodic layered structure with alternating oxide layers of various oxidation levels. A structure containing alternating ultra-thin layers of higher oxide and suboxide layers on a niobium film. Keywords: metal-oxide films, controlled film formation, layer chemical and phase profiling, X-ray photoelectron spectroscopy.
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