Technical Physics
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- 2022
Ru/Sr multilayer mirrors for the spectral range 9-12 nm
The results of studies of Ru/Sr multilayer mirrors optimized for the working wavelength range of 9-12 nm are presented in the paper. Within the framework of the presented article the strontium based multilayer structures with stable over time reflective characteristics were obtained for the first time. It is shown that Ru/Sr mirrors have the highest reflectance of all known reflective coatings, with the exception of beryllium-containing, in the spectral range of 9-12 nm. Keywords: multilayer X-ray mirrors, X-ray lithography, X-ray radiation.
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