Technical Physics Letters
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Deposition of the amorphous metal coating onto hollow glass microspheres
Amorphous metal Pt-Zr coatings micron in thickness, as well as crystalline ones, were obtained on the surfaces of hollow thin-wall glass microspheres using direct current magnetron sputtering at the deposition rate of 0.1 nm/s. Being in the range of 1-1.5 nm, the roughness of the obtained amorphous coatings is essentially lower than that of crystalline coatings of the same composition. Keywords: metal glasses, amorphous metal films, platinum, zirconium, magnetron sputtering, glass microspheres, inertial confinement fusion targets.
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