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Ultrathin cerium oxide layers for forming submicron YBCO structures
Arkhipova E.A.
1, Zorina M.V.
1, Masterov D.V.
1, Pavlov S.A.
1, Parafin A.E.
1, Yunin P.A.
1
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
Email: suroveginaka@ipmras.ru, parafin@ipmras.ru, masterov@ipmras.ru, pavlov@ipmras.ru, yunin@ipmras.ru
Nanometer-sized layers of cerium oxide (CeO2) on sapphire and the characteristics of the YBCO layers deposited on them, depending on the CeO2 growth temperature, have been studied. It is shown that the use of ultrathin CeO2 layers obtained at a reduced growth temperature opens up the possibility of forming superconducting epitaxial YBCO structures with submicron element sizes using the preliminary topology mask method. Keywords: thin films, formation of the topology of the structure, YBCO, cerium oxide.
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