Pichahchi S.V.1, Gorbenko O.M.1, Lukashenko S.Yu.1, Felshtyn M.L.1, Sapozhnikov I.D.1, Golubok A.O.1
1Institute for Analytical Instrumentation of the Russian Academy of Sciences, Saint Petersburg, Russia
Email: pichakhchi.s@yandex.ru
A method for damping the low-frequency resonance of the actuator in the feedback loop of a scanning probe microscope is presented. The method is based on center-of-mass balancing of the piezoelectric actuator combined with structural symmetrization of the scanner. Numerical modeling has been used to determine the optimal scanner design. Mounting the scanner to a rigid base in the plane of geometric symmetry of the housing suppresses the low-frequency resonance, enables an increase in the open-loop gain of the feedback system, and consequently improves the response speed of the tracking system without compromising its stability. Based on the modeling results, a scanner prototype was fabricated, and its frequency response was experimentally characterized. Good agreement between the calculated and experimental data has been obtained. The advantages of low-frequency resonance damping are demonstrated by imaging a test sample surface in scanning ion conductance microscopy operated in the hopping mode. Keywords: piezoelectric actuator, scanning speed, feedback control, center-of-mass balancing, scanning ion conductance microscopy.
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