Applicability of white light interferometers for measuring X-ray optical component roughness
M.M. Barysheva1,2, N.I. Chkhalo1,2, Yu.A. Vainer1, M.V. Zorina1, M.S. Mikhailenko1, R.M. Smertin1
1Institute for Physics of Microstructures, Russian Academy of Sciences, Afonino village, Kstovsky District, Nizhny Novgorod Region, Russia
2Lobachevsky State University, Nizhny Novgorod, Russia
Email: mmbarysheva@ipmras.ru
A supersmooth silicon wafer was used to demonstrate that modern white light interferometers provided reliable data even for high-precision wafers with subnanometer surface roughness. For validation of results obtained by mid-spatial frequency interference microscopy, PSD functions of the wafer surface measured using lenses with various magnifications, atomic force microscopy and synchrotron X-ray diffractometry were compared. Wafer roughness was measured at 0.8 nm in the spatial frequency range 1.5· 10-3-64 μ m-1. Keywords: surface roughness, white light interferometry, spectral power density function, supersmooth surfaces, atomic force microscopy, diffuse X-ray scattering, mid-spatial frequencies.
- U. Dinger, F. Eisert, H. Lasser, M. Mayer, A. Seifert, G. Seitz, S. Stacklies, F.-J. Stickel, M. Weiser. Proc SPIE, 4146, 35 (2000). DOI: 10.1117/12.406674
- S. Iles, J. Nelson. SPIE, 11175, 246 (2019). DOI: 10.1117/12.2536683
- M.M. Barysheva, Y.A. Vainer, B.A. Gribkov, M.V. Zorina, A.E. Pestov, D.N. Rogachev, N.N. Salashchenko, N.I. Chkhalo. Bull. Russ. Academy Sci.: Phys., 75 (1), 67 (2011). DOI: 10.3103/S1062873811010059
- J. Chen, T. Sun, J. Wang. SPIE, 7656, 583 (2010). DOI: 10.1117/12.863268
- V.E. Asadchikov, I.V. Kozhevnikov, Y.S. Krivonosov. Crystallography Reports, 48 (5), 836 (2003). DOI: 10.1134/1.1612604
- I.V. Kozhevnikov, V.E. Asadchikov, I.N. Bukreeva, A. Duparre, Yu.S. Krivonosov, C. Morawe, V.I. Ostashev, M.V. Pyatakhin, E. Ziegler. Proc. SPIE, 4099, 267 (2000). DOI: 10.1117/12.405809
- V.E. Asadchikov, I.V. Kozhevnikov, Yu.S. Krivonosov, R. Mercier, T.H. Metzger, C. Morawe, E. Ziegler. Nucl. Instrum. Methods Phys. Res. A, 530, 575 (2004). DOI: 10.1016/j.nima.2004.04.216
- M.M. Barysheva, N.I. Chkhalo, M.N. Drozdov, M.S. Mikhailenko, A.E. Pestov, N.N. Salashchenko, Yu.A. Vainer, P.A. Yunin, M.V. Zorina. J. X-Ray Sci. Technol., 27, 857 (2019). DOI: 10.3233/XST-190495
- Kurchatov Center for Synchrotron Radiation and Nanotechnology. PHASE beamline. http://kcsni.nrcki.ru/pages/main/sync/beamlines/phaza/ index.shtml
- A.A. Chernyshov, A.A. Veligzhanin, Y.V. Zubavichus. Nucl. Instrum. Methods Phys. Res. A, 603, 95 (2009). DOI: 10.1016/j.nima.2008.12.167
- R. Senin, M. Borisov, E. Mukhamedzhanov, M. Kovalchuk. Acta Crystallogr. A, 73, C862 (2017). DOI: 10.1107/S2053273317094028
- TELSTV. Silicon wafers. http://www.telstv.ru/?page=en_silicon_wafers
- E.V. Petrakov, N.I. Chkhalo, A.K. Chernyshev, E.I. Glushkov. Opt. Eng., 63, 114104 (2024). DOI: 10.1117/1.OE.63.11.114104
- S.C.H. Thian, W. Feng, Y.S. Wong, J.Y.H. Fuh, H.T. Loh, K.H. Tee, Y. Tang, L. Lu. J. Phys.: Conf. Ser., 48, 1435 (2006). DOI: 10.1088/1742-6596/48/1/265
- R.K. Leach, L. Brown, X. Jiang, R. Blunt, M. Conroy, D. Mauger. Guide to the measurement of smooth surface topography using coherence scanning interferometry. Measurement Good Practice Guide N 108 (National Physical Laboratory, Teddington, 2008), http://eprintspublications.npl.co.uk/id/eprint/4099
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