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Compact VLS-grating spectrograph for 3-20 nm range
Russian version
S.S. Morozov1, M.Yu. Znamenskiy1, S.A. Garakhin1, M.V. Zorina1, D.G. Reunov1, B.A. Ulasevich1, N.I. Chkhalo1
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
Email: morozov_sv@ipmras.ru
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A compact spectrograph for soft X-ray range using a variable line spacing (VLS) first-order diffraction grating. The design includes a set of innovative solutions offering smaller spectrograph dimensions for higher mobility and increased aperture ratio. The main optical components are mounted on a single base to avoid spectrograph optics mismatch. A commercial GSENSE2020BSI 13.3x13.3 mm CMOS matrix with a6.5 μm pixel size and high detective quantum efficiency in the soft X-ray range was used as a detector. The spectrograph optics contains a focusing mirror with a double-layer reflective Cr-C coating offering an increased spectrograph aperture ratio. First-order diffraction efficiency of the grating was measured and, together with the calculated dependence of resolution on wavelength, indicates a sufficiently high definition of spectral imaging of a source. X-ray optical configuration of the spectrograph, design X-ray optical properties, 3D image and photograph of the spectrograph are provided. Keywords: spectrograph, VLS grating, Cr/C double-layer mirrors, soft X-ray radiation, extreme ultraviolet radiation.
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