Study of the surface and subsurface layer of CVD- grown substrates after ultrafine polishing
Kan V.E.1,2, Khudoley A.L.3, Irzhak D.V.4, Knyazev M.A.4, Teplova T.B.1
1FREZART SV, Moscow, Russia
2Omsk Scientific Center, Siberian Branch, Russian Academy of Sciences, Omsk, Russia
3A.V. Lykov Heat and Mass Transfer Institute of National Academy of Sciences of Belarus, Minsk, Belarus
4Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast, Russia
Email: vasiliy_kan@mail.ru
Diamond substrates have been polished with different techniques. The results of the investigation of substrate surface after treatments are presented. It is shown that the magnetorheologic treatment is promising technique for ultrafine polishing. The data obtained with atomic-force microscopy, optical profilometry and X-ray reflexometry confirm the smoothing of diamond surface and thinning of subsurface layer after the ultrafine treatment. Keywords: Diamond, polishing, superhard materials, subsurface layer.
- R.A. Khmel'nitskii, N.Kh. Talipov, G.V. Tchucheva. Sintetichesky almaz dlya elektroniki i optiki (IKAR, M., 2017) (in Russian)
- T.B. Teplova. Pretsizionnaya obrabotka poverkhnostnogo sloya tverdykh i sverkhtverdykh khrupkikh materialov v rezhime kvaziplastichnosti. (Tekhnosfera, Moskva, 2023) (in Russian)
- A.L. Khudoley, V.L. Kolpashchikov, G.R. Gorodkin. Tez. dokl. II Rossiisko-Belorusskoy nauchno-tekhnicheskoy konferentsii imO.V.Lozeva "Elementnaya baza otechesvennoy radioelektroniki: importozameshchenie i primenenie" (Nizhny Novgorod, Rissiya, 2015), t. 1, s. 283-286 (in Russian)
- V.I. Kordonsky, S.R. Gorodkin. Opticheskoe materialovedenie i tekhnologiaya, 79 (9), 81 (2012) (in Russian)
- V. Holy, U. Pietsch, T. Baumbach. High-Resolution X-Ray Scattering from Thin Films and Multilayers (Springer Berlin, Heidelberg, 1999), DOI: 10.1007/BFb0109385
Подсчитывается количество просмотров абстрактов ("html" на диаграммах) и полных версий статей ("pdf"). Просмотры с одинаковых IP-адресов засчитываются, если происходят с интервалом не менее 2-х часов.
Дата начала обработки статистических данных - 27 января 2016 г.