Technical Physics Letters
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Magnetron sputtering of tin from a liquid phase in a current stabilization mode
Bulychev V. S.
1,2,3, Dubinov A. E.
1,3
1Federal State Unitary Enterprise "Russian Federal Nuclear Center - All-Russian Research Institute of Experimental Physics", Sarov, Nizhny Novgorod Region, Russia
2Bauman Moscow State Technical University, Moscow, Russia
3Sarov Physics and Technology Institute of the National Research Nuclear University MEPhI, Sarov, Nizhny Novgorod oblast, Russia
2Bauman Moscow State Technical University, Moscow, Russia
3Sarov Physics and Technology Institute of the National Research Nuclear University MEPhI, Sarov, Nizhny Novgorod oblast, Russia
Email: bulvs@mail.ru, dubinov-ae@yandex.ru
The possibility of a magnetron sputtering system operation with a liquid-metal cathode is demonstrated in the paper. The experiments with sputtering of a tin cathode from a liquid state in a current stabilization mode were carried out. The coefficient of the cathode sputtering of tin from a liquid state was estimated. Keywords: magnetron discharge, tin, sputtering.
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