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Multilayer mirrors based on Cr/Ti for X-Ray microscopy in the "water window"
Russian version
Garakhin S. A. 1, Antyushin E.S.1, Barysheva M.M. 1,2, Pestov A.E. 1, Polkovnikov V.N. 1, Pleshkov R.S.1, Smertin R.M. 1, Chkhalo N.I. 1
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
2Lobachevsky State University, Nizhny Novgorod, Russia
Email: garahins@ipmras.ru, mmbarysheva@ipmras.ru, chkhalo@ipmras.ru
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The impact of thin boron carbide (B4C) layers on the internal structure and reflection coefficients of Cr/Ti multilayer mirrors at a wavelength of 2.74 nm Cr/Ti at normal incidence angles was studied. The mirrors had 400 periods of about 1.4 nm. The usage of interlayers made it possible to increase the reflection coefficients from 5% to 11% as a result of reduction the materials mixing at the interfaces. A significant part of the article is devoted to the issue of precision reflectometry using the laboratory reflectometer in the "water window" spectral range. Keywords: X-ray, multilayer mirrors, reflectometry, soft X-ray range, "water window", interlayers, X-ray tube, diffraction grating, ion source.
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