The role of secondary electrons from profile parts of a nanogroove in its SEM image
Yu. V. Larionov1, Yu. V. Ozerin1
1Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow, Russia
Email: luv@kapella.gpi.ru
Peculiarities of dispersion of secondary electrons in nanogrooves were revealed experimentally as a result of its scanning in a lowvoltage scanning electron microscope. The important role in generation of slow secondary electrons (SSE), forming microscope image, belongs to "external" secondary electrons dispersed by one surface part of a nanogroove to another one. They contribute an additive to signal from scanning point that is due only to SSE emission from it. The phenomenon is most important for nanogrooves with steep edges. The detectable contribution into dispersion of "external" secondary electrons is made by a nanogroove bottom. "External" secondary electrons, dispersed into nanogroove, are able to escape it, to transfer along a sample surface and to induce SSE emission from adjacent parts of a relief structure. This leads to influence of nanogroove edge image from disposition of these parts. 'External' secondary electrons influence the SSE emission from a groove surface modifying property of charge conjugations on this surface. Keywords: nanometrology, lowenergy SEM, relief structure, surface charge state.
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