Low-energy ion scattering with additional mass separation: instrumentation and application
Tolstoguzov A. B.
1,2,3, Gusev S. I.
1, Fu D. J.
31Ryazan State Radio Engineering University, Ryazan, Russia
2Center for Physics and Technological Research, Universidade Nova de Lisboa, Caparica, Portugal
3Key Laboratory of Artificial Micro- and Nanostructures of Ministry of Education and Hubei Key Laboratory of Nuclear Solid Physics, School of Physics and Technology, Wuhan University, Wuhan, China
Email: a.tolstoguzov@fct.unl.pt
Hardware implementation and application of the combined energy and mass spectrometric analysis of backscattered and sputtered ions are discussed. For a ternary jewelry alloy contained Au, Ag and Cu, it was shown that this method is able improving analytical sensitivity by suppressing the background related to sputtered ions, and with heavy Ar+ ions to obtain information on the surface condition of a lanthanum sample and to detect backscattered and sputtered Ar2+ ions on this surface. Keywords: ion scattering, ion sputtering, mass spectrometric analysis, energy spectra, lanthanum
- E.S. Mashkova, V.A. Molchanov, Primenenie rasseyaniya ionov dlya analiza tverdykh tel (Energoatomizdat, M., 1995) (in Russian)
- H.H. Brongersma, M. Draxler, M. de Ridder, P. Bauer, Surf. Sci. Rep., 62 (3), 63 (2007). DOI: 10.1016/j.surfrep.2006.12.002
- O. Grizzi, M. Shi, H. Bu, J.W. Rabalais, Rev. Sci. Instrum., 61 (2), 740 (1990). DOI: 10.1063/1.1141488
- H.H. Brongersma, T. Grehl, P.A. van Hal, N.C.W. Kuijpers, S.G.J. Mathijssen, E.R. Schofield, R.A.P. Smith, H.R.J. ter Veen, Vacuum, 84 (8), 1005 (2010). DOI: 10.1016/j.vacuum.2009.11.016
- https://www.iontof.com/qtac-low-energy-ion-scattering-leis- surface-analysis.html (date of access 06.21.2022)
- R.M. Singhania, H. Price, V.Y. Kounga, B. Davis, P. Bruner, R. Thorpe, D.J. Hynek, J.J. Cha, N.C. Strandwitz, J. Vac. Sci. Technol. A, 39 (6), 063210 (2021). DOI: 10.1116/6.0001164
- T.G. Avval, S. Pruvsa, S.C. Chapman, M.R. Linford, T. vSikola, H.H. Brongersma, Surf. Sci. Spectra, 28 (1), 014201 (2021). DOI: 10.1116/6.0000953
- A. Benninghoven, F.G. Rudenauer, H.W. Werner, Secondary ion mass spectrometry. Basic concepts, instrumental aspects, applications, and trends (Wiley, N.Y., 1987)
- M. Grundner, W. Heiland, E. Taglauer, Appl. Phys., 4 (3), 243 (1974). DOI: 10.1007/BF00884235
- K. Franzreb, A. Pratt, S. Splinter, P. van der Heide, Surf. Interface Anal., 26 (8), 597 (1998). 8.412 DOI: 10.1002/(SICI)1096-9918(199807)26:8<597::AID-SIA399> 3.0.CO;2-I
- K. Wittmaack, Surf. Sci., 345 (1-2), 110 (1996). DOI: 10.1016/0039-6028(95)00876-4
- A. Tolstogouzov, S. Daolio, C. Pagura, C.L. Greenwood, Int. J. Mass Spectrom., 214 (3), 327 (2002). DOI: 10.1016/S1387-3806(02)00523-7
- S. Daolio, C. Pagura, A. Tolstogouzov, Appl. Surf. Sci., 222 (1-4), 166 (2004). DOI: 10.1016/j.apsusc.2003.08.005
- N.V. Mamedov, D.N. Sinelnikov, V.A. Kurnaev, D.V. Kolodko, I.A. Sorokin, Vacuum, 148, 248 (2018). DOI: 10.1016/j.vacuum.2017.11.026
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