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Failure regions resembling geometrical shapes in sliding naation of Si-C-N thin films used for N/MEMS
Russian version
DOI: 10.21883/TPL.2022.08.55113.19132
Dash R.1, Bhattacharyya A. S.1,2
1Dept. of Nano Science and Technology, Central University of Jharkhand, Brambe, India
2Centre of Excellence in Green and Efficient Energy Technology (CoE GEET), Central University of Jharkhand, Brambe, India
Email: arnab.bhattacharya@cuj.ac.in
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The failure regions during sliding nano indentation of technologically important SiCN thin films resembled geometrical shapes of Lemniscate and cardiod. An adhesive strength of 9 GPa was estimated. The failure followed two different stress regimes, one tangential responsible for the wear and the other axial responsible for the film/substrate adhesion. EDS spectra of the scratched region shown complete adhesive failure. Keywords: sliding naation, SiCN thin films, adhesive strength
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