Study of H, N, and O atom interaction with quasi-two-dimensional molybdenum disulfide
Melezhenko D. E.1,2, Lopaev D. V.1, Zotovich A. I.1, Voronina E. N.1,3
1Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics, Moscow, Russia
2Lomonosov Moscow State University, Moscow, Russia
3Moscow State University, Moscow, Russia
Email: voroninaen@nsrd.sinp.msu.ru

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The paper presents the results of the experimental study of O, N, and H atom interaction with ultra-thin MoS2 films demonstrating changes in properties of the surface layer of samples under investigation. Keywords: quasi-two-dimensional materials, molybdenum disulfide, plasma, ions, surface modification.
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