Technical Physics Letters
To authors
Volumes and Issues
- 2023
- 2022
Subwave textured surfaces for the radiation coupling from the waveguide
The paper presents a procedure for creating on GaAs(100) substrates textured surfaces by ion-beam etching with a focused beam. The possibility of flexibly controlling the shape and profile of the formed submicron elements of textured media is shown; this will later allow formation of textured surfaces of almost any complexity for realizing the surface radiation coupling from the waveguide. Original lithographic masks were developed, and 3D lithography was accomplished. The obtained lithographic patterns were controlled by the methods of optical, electron and atomic force microscopy. Keywords: ion-beam etching, metasurface, textured surface, lithography, surface coupling of radiation.
- D. Popa, F. Udrea, Sensors, 19, 2076 (2019). DOI: 10.3390/s19092076
- R. Szedlak, C. Schwarzer, T. Zederbauer, H. Detz, A.M. Andrews, W. Schrenk, W. Strasser, Appl. Phys. Lett., 104, 151105 (2014). DOI: 10.1063/1.4871520
- R. Szedlak, C. Schwarzer, T. Zederbauer, H. Detz, A.M. Andrews, W. Schrenk, W. Strasser, Opt. Express, 22, 15829 (2014). DOI: 10.1364/OE.22.015829
- J. Semmel, L. Nahle, S. Hofling, A. Forchel, Appl. Phys. Lett., 91, 071104 (2007). DOI: 10.1063/1.2771054
- A. Deinega, I. Valuev, B. Potapkin, Yu. Lozovik, J. Opt. Soc. Am. A, 28, 770 (2011). DOI: 10.1364/JOSAA.28.000770
- J.A. Dobrowolski, D. Poitras, P. Ma, H. Vakil, M. Acree, Appl. Opt., 41, 3075 (2002). DOI: 10.1364/AO.41.003075
- J. Gallant, M.A. Kaliteevski, D. Wood, M.C. Petty, R.A. Abram, S. Brand, G.P. Swift, D.A. Zeze, J.M. Chamberlain, Appl. Phys. Lett., 91, 161115 (2007). DOI: 10.1063/1.2800381
Подсчитывается количество просмотров абстрактов ("html" на диаграммах) и полных версий статей ("pdf"). Просмотры с одинаковых IP-адресов засчитываются, если происходят с интервалом не менее 2-х часов.
Дата начала обработки статистических данных - 27 января 2016 г.