Wavefront lens corrector for studying flat surfaces
Toropov M. N.1, Akhsakhalyan А. А.1, Malyshev I. V.1, Mikhailenko M. S.1, Pestov A. E.1, Salashchenko N. N.1, Chernyshev A. K.1, Chkhalo N. I.1
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
Email: toropov@ipm.sci-nnov.ru

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The method of manufacturing and the results of studies of a lens corrector that converts a spherical diverging front into a plane one and is intended for studying flat surfaces as part of an interferometer with a diffraction comparison wave is described. A feature of the corrector is the use of an aspherical convex surface with a maximum deviation of ~ 200 μm from the nearest sphere. The first experimental results are presented, indicating the prospects for using ion-beam processing to improve the quality of the wavefront. After the procedure of ion-beam processing, the aberrations over the entire aperture of the corrector decreased by more than 4 times and amounted to the parameter of the height difference PV = 207 nm (~ λ/3) and (RMS) = 19.2 nm (~ λ/33). On an area with a diameter of 80%, the aberrations fell to the nanometer level: PV = 65 nm (~ λ/10) and RMS = 8.3 nm (~ λ/76). Keywords: lens corrector, interferometry, aspherical lens, ion-beam processing.
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