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Development of a metasurface fabrication complex by direct laser transfer with independent displacement of donor-acceptor substrates
Kochuev D. A.
1, Chernikov A. S.
1, Chkalov R. V.
1, Khorkov K. S.1, Gubin M. Yu.
1, Shesterikov A. V.
1, Prokhorov A. V.
1
1Stoletovs Vladimir state university, Vladimir, Russia
Email: khorkov@vlsu.ru
The paper presents the development of a complex for the fabrication of metasurfaces using the laser-induced direct transfer (LIFT) method using a system for the independent movement of donor-acceptor substrates. The analysis of the main parameters of the process is carried out: the energy of the laser radiation, the distribution of the power density of the laser beam, the thickness of the donor film, the parameters of the focusing lenses and the distances between the substrates. The necessity of strict control of each of these parameters is substantiated to ensure stable and reproducible transfer of nanoparticles. The main experimental results demonstrate effective transfer of silicon nanoparticles with an optimal film thickness of about 40 nm, the use of high-aperture lenses to minimize energy parameters, as well as the effect of the donor-acceptor distance on the formation of spherical nanoparticles and the prevention of damage to the acceptor surface. The proposed complex and methodology ensure stable formation of metasurfaces with precise positioning and period control. Keywords: direct laser transfer, LIFT, laser printing, metasurfaces.
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