Volumes and Issues
Home » Technical Physics » Year 2026, issue 5 » Article p. 980
<<<>>>
Laser technologies used in manufacture of components of vacuum millimeter-wave electronic devices
Russian version
D.A. Nozhkin1,2, D.A. Bessonov1,3, I.A. Navrotsky1,4, R.A. Torgashov1,2, V.D. Churikova2, S.Yu. Molchanov5, I.S. Ozhogin2, A.A. Rostuncova1,2, N.M. Ryskin1,2
1Saratov Branch, Kotel’nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Saratov, Russia
2Saratov State University, Saratov, Russia
3Yuri Gagarin State Technical University of Saratov, Saratov, Russia
4RPE Almaz, Saratov, Russia
5Institute of Solid State Physics, Russian Academy of Sciences, Chernogolovka, Russia
PDF
The study outlines the micro-dimensional structures fabricated for the vacuum millimeter waveband electronics devices using micro-processing with nanosecond laser pulses. The specifics of laser cutting technology for thin plates made of various materials (copper, molybdenum) are discussed. The mockups of rectangular W-band (75-110 GHz) waveguides and decelerating V-band (50-65 GHz) systems were fabricated. The results of morphological analysis and experimental investigation of S-parameters of the fabricated samples are described. The design of a micro-sized electron gun has been developed, and the results of its components (cathode, focusing electrodes) fabrication are presented. Keywords: laser micro-processing, traveling wave tube, decelerating system, electron gun, rectangular waveguide.
  1. D.M. Mittleman. J. Appl. Phys., 122 (23), 230901 (2017). DOI: 10.1063/1.5007683
  2. T.S. Rappaport, Y. Xing, O. Kanhere, S. Ju, A. Madanayake, S. Mandal, A. Alkhateeb, G.C. Trichopoulos. IEEE Access, 7, 78729 (2019). DOI: 10.1109/ACCESS.2019.2921522
  3. T. Kurner, D.M. Mittleman, T. Nagatsuma (eds.). THz Communications. Paving the Way towards Wireless Tbps. Springer Series in Optical Sciences. (Springer, Cham, Switzerland, 2022), v. 234, DOI: 10.1007/978-3-030-73738-2
  4. A.D. Grigoriev Teragertsevaya elektronika (Fizmatlit, M., 2020) (in Russian)
  5. G.G. Denisov, M.Y. Glyavin, N.S. Ginzburg, I.V. Zotova, A.G. Litvak, N.Y. Peskov, N.M. Ryskin, A.V. Savilov. Vakuumnaya SVCh-elektronika: osvoyeniye teragertsevogo diapazona chastot. V kn. V.Ya. Panchenko (ed.). Teragertsevaya fotonika i optoelektronika (RAS, M., 2024), p. 374--463 (in Russian)
  6. G.-S. Park, M. Tani, J.-S. Rieh, S.Y. Park (eds.). Advances in terahertz source technologies (Jenny Stanford Publishing, Singapore, 2024)
  7. E.A. Bogomolova, A.V. Galdetsky, G.V. Ruvinsky, I.G. Soldatenko. Elektronnaya tekhnika. Ser. 1. SVCh tekhnika, 3 (546), 66 (2020) (in Russian)
  8. A.V. Starodubov, D.A. Nozhkin, I.I. Rasulov, A.A. Serdobintsev, I.O. Kozhevnikov, V.V. Galushka, V.K. Sakharov, D.A. Bessonov, A.D. Galkin, I.Sh. Bakhteev, S.Yu. Molchanov, S.V. German, N.M. Ryskin. Radiotekhnika i elektronika, 67 (10), 935 (2022) (in Russian). DOI: 10.31857/S0033849422100126
  9. R.L. Ives. IEEE Trans. Electron Devices, 70 (6), 2693 (2023). DOI: 10.1109/TED.2023.3268629
  10. X. Li, J. Feng. Micromachines, 15 (11), 1357 (2024). DOI: 10.3390/mi15111357
  11. R.A. Torgashov, N.M. Ryskin, A.G. Rozhnev, A.V. Starodubov, A.A. Serdobintsev, A.M. Pavlov, V.V. Galushka, I.Sh. Bakhteev, S.Yu. Molchanov. ZhTF, 90 (4), 686 (2020) (in Russian). DOI: 10.21883/JTF.2020.04.49096.294-19
  12. N.M. Ryskin, R.A. Torgashov, A.V. Starodubov, A.G. Rozhnev, A.A. Serdobintsev, A.M. Pavlov, V.V. Galushka, D.A. Bessonov, G. Ulisse, V. Krozer. J. Vacuum Sci. Technol. B, 39 (1), 013204 (2021). DOI: 10.1116/6.0000716
  13. D.A. Nozhkin, A.V. Starodubov, R.A. Torgashov, V.V. Galushka, I.O. Kozhevnikov, A.A. Serdobintsev, A.D. Lebedev, A.A. Kozyrev, N.M. Ryskin. IEEE Trans. Electron Devices, 72 (1), 453 (2025). DOI: 10.1109/TED.2024.3507759
  14. D.A. Nozhkin, A.V. Starodubov, A.A. Serdobintsev, I.O. Kozhevnikov, V.V. Galushka, R.A. Torgashov, I.S. Ozhogin, A.A. Rostuntsova, V.V. Emelyanov, S.Yu. Molchanov, N.M. Ryskin. Fabrication and characterization of millimeter-band planar slow-wave structures by using laser microprocessing. 2024 IEEE 9th All-Russian Microwave Conference (RMC) (Moscow, November 25--29, 2024), p. 422--425. DOI: 10.1109/RMC62880.2024.10846876
  15. A.A. Rostuntsova, R.A. Torgashov, N.M. Ryskin. IEEE Trans. Plasma Sci., 53 (6), 1134 (2025). DOI: 10.1109/TPS.2025.3567304
  16. Z. Duan, M.A. Shapiro, E. Schamiloglu, N. Behdad, Y. Gong, J.H. Booske, B.N. Basu, R.J. Temkin. IEEE Trans. Electron Devices, 66 (1), 207 (2019). DOI: 10.1109/TED.2018.2878242
  17. Z. Duan. Metamaterial-Based Electromagnetic Radiations and Applications (Springer, Singapore, 2025) DOI: 10.1007/978-981-97-8108-9
  18. A.V. Starodubov, I.S. Ozhogin, A.A. Serdobintsev, I.O. Kozhevnikov, V.N. Titov, V.V. Galushka, I.S. Bakhteev, S.Yu. Molchanov, N.M. Ryskin. Izv. universities. Radiofizika, 68 (2), 121 (2025) (in Russian). DOI: 10.52452/00213462_2025_68_02_121
  19. C.-W. Baik, H.Y. Ahn, Y. Kim, J. Lee, S. Hong, C.J. Hee, S. Kim, L.S. Hun, J.S. Yeon, S. Yu. Appl. Phys. Lett., 104 (2), 021118 (2014). DOI: 10.1063/1.4862324
  20. G. Shu, J. Liao, J. Ren, J. He, J. Deng, Z. Chang, B. Xu, G. Wang, C. Ruan, W. He. IEEE Trans. Electron Devices, 68 (11), 5826 (2021). DOI: 10.1109/TED.2021.3110183
  21. A.V. Starodubov, R.A. Torgashov, V.V. Galushka, A.M. Pavlov, V.N. Titov, N.M. Ryskin, A. Abhishek, N. Kumar. Electronics, 11 (18), 2858 (2022). DOI: 10.3390/electronics11182858
  22. I.A. Navrotsky, A.A. Burtsev, V.V. Emelyanov, V.N. Titov, N.M. Ryskin. IEEE Transactions on Electron Devices, 68 (2), 798 (2021). DOI: 10.1109/TED.2020.3041425

Подсчитывается количество просмотров абстрактов ("html" на диаграммах) и полных версий статей ("pdf"). Просмотры с одинаковых IP-адресов засчитываются, если происходят с интервалом не менее 2-х часов.

Дата начала обработки статистических данных - 27 января 2016 г.

Publisher:

Ioffe Institute

Institute Officers:

Director: Sergei V. Ivanov

Contact us:

26 Polytekhnicheskaya, Saint Petersburg 194021, Russian Federation
Fax: +7 (812) 297 1017
Phone: +7 (812) 297 2245
E-mail: post@mail.ioffe.ru