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Spark plasma sintering of In2O3-based ceramic targets
Russian version
Alhmedov A. K. 1, Murliev E. K. 1, Asvarov A. Sh.2,1
1Amirkhanov Institute of Physics, Dagestan Scientific Center, Russian Academy of Sciences, Makhachkala, Russia
2Shubnikov Institute of Crystallography of the Kurchatov Complex of Crystallography and Potonics of the National Research Centre "Kurchatov Institute", Russian Academy of Sciences, Moscow, Russia
Email: cht-if-ran@mail.ru
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The influence of the main operating factors (applied pressure, temperature and duration of isothermal holding) on the SPS-consolidation processes of dispersed submicron oxide powder compositions with different indium oxide content, as well as the kinetics of compaction and the microstructure of the ceramics formed in this case, was studied. The aim of the work was to obtain relatively high-density ceramics of three compositions relevant for practical application: In2O3-SnO2 in a weight ratio of 9:1, In2O3-ZnO in a weight ratio of 9:1 and In2O3-Ga2O3-ZnO in a weight ratio of 1:1:1. It was found that during spark plasma sintering of all three compositions there is a certain optimum temperature of isothermal holding (950 oC), above which the density begins to decrease with a significant loss of mass of the initial sample, caused by the intensification of the process of thermal decomposition of indium oxide. Optimization of sintering modes was performed, as a result ceramic targets with a diameter of 50 mm and a relative density of at least 94 % of the theoretical density for each composition were obtained. Test magnetron sputtering of the obtained targets showed high discharge stability, without any signs of arcing, which indicates high homogeneity of their composition and properties. Keywords: SPS, ceramics, transparent coducting oxide, In2O3, ITO, IZO, IGZO, target, magnetron sputtering
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