Theoretical and experimental study of fine erbium oxide powder treatment in RF plasma jet to obtain light-emitting microspheres
Sergeev V. A.1, Zverev S. G.1, Grachev S. Yu.1, Medvedev A. V.2, Ivanov D. V.1, Mashigin A. A.1
1Peter the Great Saint-Petersburg Polytechnic University, St. Petersburg, Russia
2Ioffe Institute, St. Petersburg, Russia
Email: d.ivanov@spbstu.ru

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Mathematical modeling of processes in a RF inductively coupled plasma torch is described. The obtained temperature and plasma velocity distributions were used as initial data for calculating the motion of erbium oxide powder in a plasma jet. As a result, the technological process parameters were obtained that ensure effective processing. The obtained operating parameters were used for experimental studies. The obtained erbium oxide microspheres turned out to be an order of magnitude larger than the initial powder. The article presents hypotheses explaining this result. Optical studies of the obtained microspheres showed intense photoluminescence in the visible and near infrared spectral range. Keywords: erbium oxide, light-emitting microspheres, plasma treatment, RF inductively coupled plasma torch
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