The α-Cr2O3 layers grown on (100) β-Ga2O3 substrates by ultrasonic vapor chemical epitaxy (mist-CVD)
Nikolaev V. I.1, Timashov R. B.1, Stepanov A. I.1, Chikiryaka A. V.1, Scheglov M. P.1, Shapenkov S. V.1, Krymov V. M.1
1Ioffe Institute, St. Petersburg, Russia
Email: chikiryaka@mail.ru
Heterocontacts based on α-Cr2O3/β-Ga2O3 have recently attracted interest, as they enable realizing in device structures the potentials of such an ultra-wide-bandgap semiconductor as gallium oxide; the matter is that it is yet impossible to obtain gallium oxide samples of the p-type conductivity with the parameters suitable for instrumental applications, while this is quite achievable for α-Cr2O3. In this work, epitaxial chromium oxide layers on bulk gallium oxide substrates up to 1 μm and more thick were obtained by the CVD method for the first time. The question of orientation of these layers was considered. X-ray diffraction has revealed that the α-Cr2O3 layers grown on (100) β-Ga2O3 wafers exhibit a single layer reflex corresponding to (11 26). Keywords: gallium oxide, chromium oxide, mist-CVD epitaxy, heterostructures, multilayer films.
- S. Ghosh, M. Baral, R. Kamparath, R.J. Choudhary, D.M. Phase, S.D. Singh, T. Ganguli, Appl. Phys. Lett., 115, 061602 (2019). DOI: 10.1063/1.5100589
- W.A. Callahan, K. Egbo, Ch.-W. Lee, D. Ginley, R. O'Hayre, A. Zakutayev, Appl. Phys. Lett., 124, 153504 (2024). DOI: 10.1063/5.0185566
- G.T. Dang, Y. Suwa, M. Sakamoto, L. Liu, P. Rutthongjan, S. Sato, T. Yasuoka, R. Hasegawa, T. Kawaharamura, Appl. Phys. Express, 11, 111101 (2018). DOI: 10.7567/APEX.11.111101
- Md Sadullah, S.M. Hussain, K. Ghosh, Chem. Papers, 77, 6041 (2023). DOI: 10.1007/s11696-023-02920-2
- V.I. Nikolaev, R.B. Timashov, A.I. Stepanov, S.I. Stepanov, A.V. Chikiryaka, M.P. Shcheglov, A.Ya. Polyakov, Tech. Phys. Lett., 49 (5), 81 (2023). DOI: 10.21883/TPL.2023.05.56036.19549
- V.I. Nikolaev, A.Y. Polyakov, V.M. Krymov, D.S. Saranin, A.V. Chernykh, A.A. Vasilev, I.V. Schemerov, A.A. Romanov, N.R. Matros, A.I. Kochkova, P. Gostishchev, S.V. Chernykh, S.V. Shapenkov, P.N. Butenko, E.B. Yakimov, S.J. Pearton, ECS J. Solid State Sci. Technol., 13, 123004 (2024). DOI: 10.1149/2162-8777/ad9ace
- T. Kudo, K. Sekiguchi, K. Sankoda, N. Namiki, S. Nii, Ultrason. Sonochem., 37, 16 (2017). DOI: 10.1016/j.ultsonch.2016.12.019
- V.I. Nikolaev, S.V. Shapenkov, R.B. Timashov, A.I. Stepanov, M.P. Scheglov, A.V. Chikiryaka, A.Y. Polyakov, S.J. Pearton, J. Alloys Compd., 994, 174687 (2024). DOI: 10.1016/j.jallcom.2024.174687
- S.V. Shapenkov, R.B. Timashov, A.I. Stepanov, G.V. Varygin, A.V. Chikiryaka, M.P. Shcheglov, V.I. Nikolaev, v cb. Tezisy IV Mezhdunar. konf. Fizika kondensirovannykh sostoyaniy", pod red. B.B. Straumala (IFTT RAN, Chernogolovka, 2025), s. 297. DOI: 10.24412/cl-37349-FKS-4.280 (in Russian)
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