Okhapkin A. I. 1, Korolyov S. A.1, Kraev S. A.1, Yunin P. A.1, Arkhipova E. A.1
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
Email: poa89@ipmras.ru, PESH@ipm.sci-nnov.ru, kraev@ipmras.ru, yunin@ipmras.ru, suroveginaka@ipmras.ru
The resistivity, dielectric constant and breakdown field of diamond-like carbon multilayer films with different contents of the sp3-phase obtained in inductively coupled methane plasma have been investigated. The films resistivity appeared to be strongly dependent on the deposition parameters, while the dielectric constant was almost the same for all the samples. As a result of measuring electric current versus temperature and voltage, the hopping type of conductivity was established, and the average hop length and activation energy were determined. When voltage is higher than 1 V, a continuous increase in current up to breakdown takes place due to modification of the film internal structure. Keywords: diamond-like carbon, multilayer films, electrophysical properties, hopping conduction mechanism.
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Дата начала обработки статистических данных - 27 января 2016 г.