Technical Physics
To authors
Quantitative local elemental composition analysis of the of materials by EELS technique in STEM under conditions of core-loss lines overlapping
Prikhodko K. E.
1,2, Dement'eva M.M.
1
1National Research Center “Kurchatov Institute”, Moscow, Russia
2National Research Nuclear University “MEPhI”, Moscow, Russia
2National Research Nuclear University “MEPhI”, Moscow, Russia
Email: prihodko_ke@nrcki.ru
A method has been developed for processing spectra of characteristic electron energy losses for quantitative analysis of atomic concentrations of elements within the framework of STEM in conditions of close proximity of lines of various elements. In addition, the case of the presence of features on the spectra of energy losses is considered, which, in turn, makes it difficult to isolate the background within the framework of a standard analysis. Using the example of the study of the atomic composition of a thin NbN film, it is shown that the dispersion of the obtained concentration values for various points of the sample is reduced to several atomic percent. Keywords: Characteristic electron energy loss spectroscopy (EELS), transmission scanning electron microscopy (STEM), high-resolution transmission electron microscopy, NbN thin superconducting films, background subtraction in EELS, overlapping of characteristic loss lines.
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