The effect of an electric field on the graphene hydrogenation rate in inductively coupled plasma
E.I. Preobrazhensky1, A.V. Vodopyanov1,2, A.V. Nezhdanov2, A.I. Mashin2
1Federal Research Center A.V. Gaponov-Grekhov Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia
2Lobachevsky University of Nizhny Novgorod, Nizhny Novgorod, Russia
Email: evgenypr@ipfran.ru
Results of experimental treatment of monolayer graphene in low pressure inductively coupled hydrogen-containing plasma are described herein. The effect of an electric field on the degree of hydrogenation of samples was studied. Raman scattering spectra of the samples were compared before and after the plasma treatment at various voltages on the sample with respect to a grounded chamber. A method of measuring conductive properties of samples during plasma treatment was proposed. These graphene parameters were measured depending on the plasma treatment time at various voltages on the sample. An assumption is made that the main particles that can react with graphene during plasma treatment are positive hydrogen ions. Keywords: plasma, graphene, plasma-based chemistry, inductively coupled plasma, graphane.
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