Influence of nanosecond ytterbium laser irradiation modes on the morphology of porous silicon films
Rybina N. V.1, Rybin N. B.1, Khilov V. S.2, Tregulov V. V.2, Gorbunova Yu. N.2
1Ryazan State Radio Engineering University, Ryazan, Russia
2Ryazan State University named for S. Yesenin, Ryazan, Russia
Email: nikolay.rybin@yandex.ru
It has been shown that the morphology of the surface of porous silicon films can be flexibly controlled by changing the irradiation parameters of a pulsed nanosecond ytterbium fiber laser. A relationship between the parameters of laser irradiation of porous films and the information-correlation characteristics of their frontal surface has been established. The semiconductor structures under study may be relevant for the implementation of neural networks and artificial intelligence systems, as well as for the implementation of promising chemical sensors. Keywords: porous silicon, metal-stimulated etching, laser ablation, mutual information, fluctuation analysis, information state.
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