Technical Physics
To authors
The coating a liquid glass of the optical element substrates and its molecular composition
Petrova D.V.1,2, Mikhailenko M. S.1, Zorina M. V.1, Drozdov M. N.1, Pestov A. E.1, Chkhalo N. I.1
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
2Lobachevsky State University, Nizhny Novgorod, Russia
2Lobachevsky State University, Nizhny Novgorod, Russia
Email: petrovadar@ipmras.ru
The article presents the results obtained by coating a liquid glass solution to the substrates of optical elements, followed by their etching with an ion beam. Particular attention is turned on the surface roughness of the optical element both after the deposition of liquid glass and after etching. A film of the applied glass composition was studied using secondary ion mass spectrometry (SIMS). Keywords: liquid glass, films, surface roughness, polishing, ion etching, secondary ion mass spectrometry. DOI: 10.61011/TP.2023.07.56647.107-23
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