Technical Physics
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- 2022
Research and creation of broadband X-ray mirrors with a spectral transmission band coinciding with emission lines and the possibility of filtering
The article considers broadband multilayer X-ray mirrors based on Mo/Be and Mo/Si structures with a transmission band coinciding with the Si Lα (13.5 nm) and Sn (13.5 nm) emission lines. The described structures are of great interest for the currently developed liquid source of EUV radiation, since they make it possible to increase the efficiency of the source-X-ray optical system due to the "complete" capture of emission lines. Keywords: extreme ultraviolet radiation, emission spectrum, laser spark, multilayer X-ray mirror.
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Дата начала обработки статистических данных - 27 января 2016 г.