Technical Physics Letters
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- 2023
- 2022
Interaction of molecular oxygen ions with copper surface: features of the energy spectra of sputtered and backscattered ions
Tolstoguzov A. B.
1,2,3, Gusev S. I. 1, Fu D. J.3
1Ryazan State Radio Engineering University, Ryazan, Russia
2Center for Physics and Technological Research, Universidade Nova de Lisboa, Caparica, Portugal
3Key Laboratory of Artificial Micro- and Nanostructures of Ministry of Education and Hubei Key Laboratory of Nuclear Solid Physics, School of Physics and Technology, Wuhan University, Wuhan, China
2Center for Physics and Technological Research, Universidade Nova de Lisboa, Caparica, Portugal
3Key Laboratory of Artificial Micro- and Nanostructures of Ministry of Education and Hubei Key Laboratory of Nuclear Solid Physics, School of Physics and Technology, Wuhan University, Wuhan, China
Email: a.tolstoguzov@fct.unl.pt
An experimental study on the energy spectra of ions emitted from the surface of a polycrystalline Cu target under the bombardment by 2 keV O2+ molecular ions was carried out. Sputtered atomic ions Cu+ and O+ were prevailed among the positively charged secondary ions, and among the negative ions, in addition to sputtered ions Cu-, CuO2-, O-, and O2-, intense elastically and inelastically backscattered O-, and O2+ ions were revealed. Keywords: energy spectra, ion sputtering, backscattered ions, charge exchange.
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