Turapov I. Kh.1, Bekpulatov I. R.
1, Tashatov A. Q.2, Umirzakov B.E.1
1Tashkent State Technical University, Tashkent, Uzbekistan
2Karshi State University, Karshi, Uzbekistan
Email: turapov_19_86@mail.ru, bekpulatov85@rambler.ru, atashatov@mail.ru, be.umirzakov@gmail.com
In this work, to obtain ordered nanophases of Co and CoSi2, nuclei are preliminarily created on the Si surface by bombardment with Ar+ ions with E0=0.5 keV and D=8· 1013 cm-2. It was found that a narrow band gap (Eg~ 0.3 eV) appears in the band structure at the Co layer thickness of less than 3 ML. The metallic properties of the Co film manifest themselves at a thickness of more than 4-5 ML. Heating the Co/Si(111) system at T=900 K leads to the formation of nanophases and CoSi2 nanofilms. The Eg value is 0.8 eV for the CoSi2 nanophases with theta~ 3 ML and 0.6 eV for the CoSi2 film. Keywords: nanophase, epitaxy, low-energy bombardment, surface, single crystal, island growth, ion dose, degree of coverage.
- J.S. Pan, R.S. Liu, Z. Zhang, S.W. Poon, W.J. Ong, E.S. Tok, Surf. Sci., 600 (6), 1308 (2006). DOI: 10.1016/j.susc.2006.01.029
- S.P. Dash, D. Goll, H.D. Carstanjen, Appl. Phys. Lett., 90 (13), 132109 (2007). DOI: 10.1063/1.2717525
- J.S. Tsay, C.S. Yang, Y. Liou, Y.D. Yao, J. Appl. Phys., 85 (8), 4967 (1999). DOI: 10.1063/1.370060
- H.W. Chang, J.S. Tsay, Y.C. Hung, F.T. Yuan, W.Y. Chan, W.B. Su, C.S. Chang, Y.D. Yao, J. Appl. Phys., 101 (9), 09D124 (2007). DOI: 10.1063/1.2712532
- M.V. Gomoyunova, G.S. Grebenyuk, I.I. Pronin, Tech. Phys., 56 (6), 865 (2011). DOI: 10.1134/S1063784211060077
- K.O. Hara, Ch.T. Trinh, K. Arimoto, J. Yamanaka, K. Nakagawa, Y. Kurokawa, T. Suemasu, N. Usami, in IEEE 43rd Photovoltaic Specialists Conf. (PVSC) (IEEE, 2016), p. 25. DOI: 10.1109/PVSC.2016.7750159
- T. Nemoto, S. Matsuno, T. Sato, K. Gotoh, M. Mesuda, H. Kuramochi, K. Toko, N. Usami, T. Suemasu, Jpn. J. Appl. Phys., 59 (SF), SFFA06 (2020). DOI: 10.35848/1347-4065/ab69dc
- V.L. Dubov, D.V. Fomin, Uspekhi prikl. fiziki, 4 (6), 599 (2016). https://www.advance.orion-ir.ru/UPF-16/6/UPF-4-6-599.pdf (in Russian)
- B.E. Umirzakov, D.A. Tashmukhamedova, A. Dzhurakhalov, E.U. Boltaev, Mater. Sci. Eng., 101 (1), 124 (2003). DOI: 10.1016/S0921-5107(02)00677-3
- A.S. Rysbaev, A.K. Tashatov, Sh.X. Dzhuraev, Zh.B. Khuzhaniyazov, G. Arzikulov, S.S. Nasriddinov, J. Synch. Investig., 5 (6), 1193 (2011). DOI: 10.1134/S1027451011100193
- A.A. Alekseev, D.A. Olyanich, T.V. Utas, V.G. Kotlyar, A.V. Zotov, A.A. Saranin, Tech. Phys., 60 (10), 1508 (2015). DOI: 10.1134/S1063784215100023
- [Y.S. Ergashov, D.A. Tashmukhamedova, B.E. Umirzakov, J. Synch. Investig., 11 (2), 480 (2017). DOI: 10.1134/S1027451017020252
- Y.S. Ergashov, B.E. Umirzakov, Tech. Phys., 63 (12), 1820 (2018). DOI: 10.1134/S1063784218120058
- V.I. Rudakov, Yu.I. Denisenko, V.V. Naumov, S.G. Simakin, Tech. Phys. Lett., 37 (2), 112 (2011). DOI: 10.1134/S106378501102012X
- V.S. Vavilov, Sov. Phys. Usp., 28 (2), 196 (1985). DOI: 10.1070/PU1985v028n02ABEH003854
- R. Ayache, M. Sidoumou, A. Kolitsch, Int. J. Thin Films Sci. Technol., 4 (3), 211 (2015). DOI: 10.12785/ijtfst/040309
- N.N. Gerasimenko, Ros. khim. zhurn., 46 (5), 30 (2002). http://www.chemnet.ru/rus/journals /jvho/2002-5/30.pdf (in Russian)
- B.E. Umirzakov, S.B. Donaev, J. Synch. Investig., 11 (4), 746 (2017). DOI: 10.1134/S1027451017040139.
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