Silicon ablation in air by mono- and bichromatic laser pulses with wavelength 355 and 532 nm
Chumakov A. N. 1, Luchkouski V. V. 1, Nikonchuk I. S. 1, Matsukovich A. S.1
1B.I.Stepanov Institute of Physics, National Academy of Sciences of Belarus, Minsk, Belarus
Email: a.@dragon.bas-net.by, a.chumakov@dragon.bas-net.by

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Ablation of silicon sample in air under irradiance of single and double laser pulses with wavelengths 355 and 532 nm was studied by means of optical and scanning electron microscopy, raman spectroscopy, profilometry of laser craters as well as video registration of plasma's plume radiation in time. Dependence of specific sample's material removal on laser fluence and time interval between coupled pulses of bichromatic laser irradiance was established. Spallation of silicon was found in broad range of irradiance parameters and parameters of craters formed by ablation and spallation under the action of bichromatic laser radiation were determined. Keywords: nanosecond laser ablation, specific mass removal, surface modification, laser plasma dynamics, crater formation, spallation
  1. S.I. Anisimov, Ya.A. Imas, G.S. Romanov, Yu.V. Khodyko, Deistvie izlucheniya bol'shoi moshchnosti na metally (Nauka, M., 1970) (in Russian)
  2. J.F. Ready, Effects of High-Power Laser Radiation (Academic Press, 1971)
  3. W.W. Duley, Laser Processing and Analysis of Materials (Springer, Boston, 1983)
  4. M.N. Libenson, E.B. Yakovlev, G.D. Shandybina, Vzaimodeistvie lazernogo izlucheniya s veshchestvom (silovaya optika). Chast' II. Lazernyi nagrev i razrushenie materialov (NIU ITMO, St. Petersburg, 2014) (in Russian)
  5. H.C. Liu, X.L. Mao, J.H. Yoo, R.E. Russo. Spectrochim. Acta, Part B, 54 (11), 1607 (1999). DOI: 10.1016/S0584-8547(99)00092-0
  6. J.H. Yoo, S.H. Jeong, R. Greif, R.E. Russo. J. Appl. Phys., 88 (3), 1638 (2000). DOI: 10.1063/1.373865
  7. M. Panzner, J. Kasper, H. Wust, U. Klotzbach, E. Beyer. Proc. SPIE, 4637, 496 (2002). DOI: 10.1117/12.470659
  8. H. Pantsar, H. Herfurth, S. Heinemann, P. Laakso, R. Penttila, Y. Liu, G. Newaz. In: 27th International Congress on Applications of Lasers \& Electro-Optics (Temecula California, ALIA, 2008), p. 278. DOI: 10.2351/1.5061387
  9. L.Ya. Min'ko, A.N. Chumakov, N.A. Bosak, Sov. J. Quantum Electron., 20 (11), 1389 (1990). DOI: 10.1070/QE1990v020n11ABEH007540
  10. J. Bonse, S. Baudach, J. Kruger, W. Kautek, M. Lenzner. Appl. Phys. A, 74, 19 (2002). DOI: 10.1007/s003390100893
  11. J.M. Bovatsek, R.S. Patel. Proc. SPIE, 7585, 75850K (2010). DOI:10.1117/12.845298
  12. G. Galasso, M. Kaltenbacher, A. Tomaselli, D. Scarpa. J. Appl. Phys., 117 (12), 123101 (2015). DOI: 10.1063/1.4915118
  13. V.S. Kondratenko, Sposob rezki khrupkikh materialov, RF Patent No. 2024441 (1991) (in Russian)
  14. T. Monodane, E. Ohmura, F. Fukuyo, K. Fukumitsu, H. Morita, Y. Hirata. JLMN, 1 (3), 231 (2006). DOI: 10.2961/jlmn.2006.03.0016
  15. V.S. Kondratenko, A.S. Naumov, Vestn. MGTU MIREA, 2 (3(8)), 1 (2015) (in Russian)
  16. A.N. Chumakov, N.A. Bosak, P.I. Verenich. High Temp. Mater. Processes, 18 (4), 269 (2014). DOI: 10.1615/HighTempMatProc.2015015608
  17. A.N. Chumakov, N.A. Bosak, A.V. Panina. J. Appl. Spectr., 84, 620 (2017). DOI:10.1007/s10812-017-0519-y
  18. I.S. Nikonchuk, A.N. Chumakov. J. Phys.: Conf. Ser., 666, 012021 (2016). DOI:10.1088/1742-6596/666/1/012021
  19. P.G. Spizzirri, J.H. Fang, S. Rubanov, E. Gauja, S. arXiv:1002.2692 [cond-mat.mtrl-sci] (Cornell University, NY.)
  20. T.P. Nguyen, S. Lefrant. Solid St. Commun., 57 (4), 235 (1986). DOI:10.1016/0038-1098(86)90146-8
  21. V.S. Levitskii, Candidate's Dissertation in Engineering (LETI, St. Petersburg, 2016) (in Russian).
  22. V.V. Lychkovskii, A.N. Chumakov, in Int. School-Conf. "Modern Problems in Physics", ed. I.S. Nikonchuk, M.S. Usachenok (Inst. Phys. NAS Belarus, Minsk, 2020), pp. 37-38 (in Russian).
  23. Ya.B. Zel'dovich, Yu.P. Raizer, Fizika udarnykh voln i vysokotemperaturnykh gidrodinamicheskikh yavlenii (Nauka, M., 1966) (in Russian)
  24. S.A. Abrosimov, A.P. Bazhulin, V.V. Voronov, A.A. Geras'kin, I.K. Krasyuk, P.P. Pashinin, A.Yu. Semenov, I.A. Stuchebryukhov, K.V. Khishchenko, V.E. Fortov. Quant. Electron., 43 (3),246 (2013). DOI: 10.1070/QE2013v043n03ABEH015106
  25. J. Ren, S.S. Orlov, L. Hesselink. J. Appl. Phys., 97, 104304 (2005). DOI:10.1063/1.1896095

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