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Formation of nanostructured films based on MoS2, WS2, MoO2 and their heterostructures
Russian version
DOI: 10.21883/TP.2022.13.52225.102-21
Loginov A. B. 1, Ismagilov R. R. 1, Bokova-Sirosh S. N. 2, Bozhev I. V. 1,3, Obraztsova E. D.2, Loginov B. A. 4, Obraztsov A. N.1,5
1Lomonosov Moscow State University, Moscow, Russia
2Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow, Russia
3Quantum technologies centre M. V. Lomonosov Moscow State University, Moscow, Russia
4National Research University of Electronic Technology, Zelenograd, Moscow, Russia
5University of Eastern Finland, Department of Physics and Mathematics, Joensuu, Finland
Email: loginov.ab15@physics.msu.ru, ismagil@polly.phys.msu.ru, bokova.sirosh@gmail.com, bozhjev.ivan@physics.msu.ru, b-loginov@mail.ru
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In this work thin film coatings based on WS2, MoS2, MoO2 and their composites were synthesized, morphological and structural properties of deposited coatings were studied. Chemical vapor deposition with heated MoO3, WO3, S powder as precursors was used. Dependence of structural and morphological properties, chemical composition of deposited films on parameters of synthesis was defined. Films of vertically aligned 10 nm thick plate crystals consisting both of pure MoO2 and MoO2 covered with thin MoS2 layer were obtained. Formation of polycrystalline films of regular triangular shaped WS2 and uniform continuous 20 nm thick WS2 films with covering area of 2x2 mm has also been observed. In this work we also report about synthesis of films consisting of regular triangular shaped WS2 crystals and MoS2 irregularly shaped crystals overlapping each other. Keywords: 2D materials, transition metal dichalcogenides, heterostructures, CVD, AFM.
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