Structural and reflective characteristics of Cr/C multilayer mirrors synthesized by reactive sputtering method
Shaposhnikov R. A.1, Garakhin S. A.1, Polkovnikov V. N.1, Chkhalo N. I.1
1Institute for physics of microstructure RAS, Nizhny Novgorod, Russia
Email: shaposhnikov-roma@mail.ru
The paper presents the results of a study of the reflective characteristics and structural parameters of multilayer X-ray mirrors based on a pair of Cr/C materials optimized for the spectral range of wavelengths of 44-66 Angstrem. The article also presents the results of a study of Cr/C structures synthesized in an argon + nitrogen gas mixture. Keywords: Multilayer X-ray mirrors, magnetron sputtering, X-ray microscopy, carbon transparency window, biological research.
- R. Shaposhnikov, V. Polkovnikov, S. Garakhin, Yu. Vainer, N. Chkhalo, R. Smertin, K. Durov, E. Glushkov, S. Yakunin, M. Borisov. J. Synchrotron Rad., 31, 268 (2024). DOI: 10.1107/S1600577524000419
- M. Fernandez-Perea, R. Soufli, J.C. Robinson, L.R. De Marcos, J.A. Mendez, J.I. Larruquert, E.M. Gullikson. Opt. Express, 20 (21), C24018 (2012). DOI: 10.1364/OE.20.024018
- R. Falcone, C. Jacobsen, J. Kirz, S. Marchesini, D. Shapiro, J. Spence. Contemporary Phys., 52 (4), 293 (2011). DOI: 10.1080/00107514.2011.589662
- S.V. Shestov, A.S. Ulyanov, E.A. Vishnyakov, A.A. Pertsov, S.V. Kuzin. Astronomical Telescopes and Instrumentation, 9144, 91443G (2014). DOI: 10.1117/12.2055946
- S. Braun, H. Mai, M. Moss, R. Scholz, A. Leson. Jpn. J. Appl. Phys., 41, 4074 (2002). DOI: 10.1143/JJAP.41.4074
- V.N. Polkovnikov, N.I. Chkhalo, R.A. Shaposhnikov, A.D. Nikolenko. ZhTF, 93 (7), 943 (2023) (in Russian). DOI: 10.21883/JTF.2023.07.55750.102-23
- Q. Huang, J. Fei, Y. Liu, P. Li, M. Wen, C. Xie, P. Jonnard, A. Giglia, Z. Zhang, K. Wang, Z. Wang. Opt. Lett., 41 (4), 701 (2016). DOI: 10.1364/OL.41.000701
- I.A. Artyukov, A.V. Vinogradov, Yu.S. Kasyanov, S.V. Savelyev. Kvantovaya elektronika, 34 (8), 691 (2004) (in Russian). DOI: 10.1070/QE2004v034n08ABEH002723
- A.V. Vinogradov. Zerkal'naya rentgenovskaya optika (Mashinostroenie, L., 1989) (in Russian)
- J. Feng, Q. Huang, H. Wang, X. Yang, A. Giglia, C. Xie, Z. Wang. J. Synchrotron Rad., 26, 720 (2019). DOI: 10.1107/S1600577519001668
- J.T. Zhu, B. Wang, Z. Zhang, H.C. Wang, Y. Xu, F.L. Wang, Z.S. Wang, L.Y. Chen, M.Q. Cui. X-Ray Lasers, 547 (2006), DOI: 10.1007/978-1-4020-6018-2_70
- M. Wen, L. Jiang, Z. Zhang, Q. Huang, Z. Wang, R. She, H. Feng, H. Wang. Thin Solid Films, 592, 262 (2015). DOI: 10.1016/j.tsf.2015.06.005
- S. Deng, H. Qi, K. Yi, Z. Fan, J. Shao. Appl. Surf. Sci., 255, 7434 (2009). DOI: 10.1016/j.apsusc.2009.04.014
- H. Takenaka, S. Ichimaru, K. Nagai, T. Ohchi, H. Ito, E.M. Gullikson. Surf. Interface Anal., 37, 181 (2005). DOI: 10.1002/sia.1959
- M. Niibe, M. Tsukamoto, T. Iizuka, A. Miyake, Y. Watanabe, Y. Fukuda. Intl Symp. Opt. Fabrication, Testing, and Surface Evaluation., (1992). DOI: 10.1117/12.132127
- J. Feng, Q. Huang, R. Qi, X. Xu, H. Zhou, T. Huo, A. Giglia, X. Yang, H. Wang, Z. Zhang, Z. Wang. Opt. Express, 27 (26), 38493 (2019). DOI: 10.1364/OE.27.038493
- S.S. Andreev, M.M. Barysheva, Yu.A. Vayner, P.K. Gaikovich, D.E. Paryev, A.E. Pestov, N.N. Salashchenko, N.I. Chkhalo. Kristallografiya, 58 (3), 497 (2013) (in Russian). DOI: 10.7868/S002347611303003X
- D.S. Kuznetsov, A.E. Yakshin, J.M. Sturm, F. Bijkerk. J. Nanosci. Nanotechnol, 19 (1), 585 (2019). DOI: 10.1166/jnn.2019.16476
- D. Xu, Q. Huang, Y. Wang, P. Li, M. Wen, P. Jonnard, A. Giglia, I.V. Kozhevnikov, K. Wang, Z. Zhang, Z. Wang. Opt. Express, 23 (26), 33018 (2015). DOI: 10.1364/OE.23.033018
- R.M. Smertin, M.M. Barysheva, N.I. Chkhalo, S.A. Garakhin, I.V. Malyshev, V.N. Polkovnikov. Opt. Express, 32 (15), 26583 (2024). DOI: 10.1364/OE.524921
- D.S. Kuznetsov, A.E. Yakshin, J.M. Sturm, R.W.E. van de Kruijs, E. Louis, F. Bijkerk. Opt. Lett., 40 (16), 3778 (2015). DOI: 10.1364/OL.40.003778
- N.I. Chkhalo, S. Kunstner, V.N. Polkovnikov, N.N. Salashchenko, F. Schafers, S.D. Starikov. Appl. Phys. Lett., 102, 011602 (2013). DOI: 10.1063/1.4774298
- D.L. Windt, E.M. Gullikson. Appl. Opt., 54 (18), 5850 (2015). DOI: 10.1364/AO.54.005850
- M. Wu, C. Burcklen, J.M. Andre, K.L. Guen, A. Giglia, K. Koshmak, S. Nannarone, F. Bridou, E. Meltchakov, S. de Rossi, F. Delmotte, P. Jonnard. Opt. Eng., 56 (11), 117101 (2017). DOI: 10.1117/1.OE.56.11.117101
- M. Prasciolu, A.F.G. Leontowich, K.R. Beyerlein, S. Bajt. Appl. Opt., 53 (10), 2126 (2014). DOI: 10.1364/AO.53.002126
- I.G. Zabrodin, B.A. Zakalov, I.A. Kaskov, E.B. Klyuenkov, V.N. Polkovnikov, N.N. Salashchenko, S.D. Starikov, L.A. Suslov. Poverkhnost. Rentgenovskie, sinkhrotronnye i neytronnye issledovaniya 7, 37 (2013) (in Russian). DOI: 10.7868/S0207352813070202
- M.S. Bibishkin, N.I. Chkhalo, A.A. Fraerman, A.E. Pestov, K.A. Prokhorov, N.N. Salashchenko, Yu.A. Vainer. Nucl. Instrum. Methods Phys. Res. A, 543, 333 (2005). DOI: 10.1016/j.nima.2005.01.251
- M. Svechnikov. J. Appl. Crystall., 53 (1), 244 (2020). DOI: 10.1107/S160057671901584X
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