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Experimental stand for studying the characteristics of powerful laser-plasma sources of EUV radiation

Russian version

Perekalov A. A.¹, Guseva V. E.¹, Nechay A. N.¹, Chkhalo N. I.¹, Veprev P. A.¹, Artyukhov A. I.¹

¹Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia

Email: perekalov@ipmras.ru

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Abstract
References
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The design and characteristics of a setup for studying powerful laser-plasma sources of extreme ultraviolet radiation are described. A pulsed Nd:YAG- laser with a pulse duration of 5.2 ns, pulse energy of up to 0.7 J and a pulse repetition rate of 10 Hz is used to form a laser spark. A supersonic gas jet of Xe formed by a conical nozzle equipped with a pulse valve. The diameter of the critical section of the nozzle is 500 μm, the length is 5 mm, the half-angle of the cone aperture is 4.5^o. To study high-power laser-plasma sources, it is planned to equip the setup with conical nozzles with a critical section diameter of 200-300 μm without a pulse valve and a laser system with a pulse repetition rate of 1 kHz and higher. A high-performance pumping system with a total capacity of 9000 l/s allows maintaining a high vacuum level and conducting research in conditions close to the operating conditions of radiation sources for the new generation of lithographs being designed. Keywords: laser plasma, EUV radiation, gas-jet targets, conversion efficiency.

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