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Optical properties of non-stoichiometric titanium oxides
Russian version
Gerasimova A.K. 1, Voronkovskii V.A. 1, Kalmykov D.A.1, Aliev V.Sh. 1,2, Volodin V.A.1,3, Demyanenko M.A.1
1Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2Novosibirsk State Technical University, Novosibirsk, Russia
3Novosibirsk State University, Novosibirsk, Russia
Email: gerasimova@isp.nsc.ru, voronkovskii@isp.nsc.ru, kalmykov@isp.nsc.ru, aliev@isp.nsc.ru, volodin@isp.nsc.ru, demyanenko@isp.nsc.ru
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Optical properties of non-stoichiometric titanium oxides TiO2-δ with different magnitude of deviation from stoichiometry δ have been investigated. The films were synthesized by ion-beam sputtering deposition method. The composition of the films was determined by X-ray photoelectron spectroscopy. The relationship between the optical parameters (n,k) of the films and their composition δ has been established. It was found that annealing of the films of the composition δ~0.58±0.02 at temperatures 350-600oC leads to a significant increase in absorption in the THz regions of the spectrum due to the growth of micron-sized plate-shaped crystals in the films, according to the data of scanning electron microscopy. Keywords: thin films, non-stoichiometric titanium oxides, X-ray photoelectron spectroscopy, spectral ellipsometry, optical losses.
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