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Capsule gas-filled target for a laser-plasma EUV source
Russian version
Lopatin A.Ya.1, Nachay A.N.1, Perekalov A.A.1, Pestov A.E.1, Soloviev A.A.2, Tsybin N.N.1, Chkhalo N.I.1, Dmitriev D.S.1
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
2Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod, Russia
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A new design of a laser target - a container with a thin-film wall containing a gas under significant pressure is proposed. It is assumed (and this assumption will be tested experimentally), that, with a certain combination of design parameters, lines belonging to the gas enclosed in the target volume will prevail in the spectrum of extreme ultraviolet radiation of a laser-plasma source with such a target. The necessary experimental equipment has been developed and manufactured, including a set of identical targets with a Mo/ZrSi2 membrane with a thickness of 0.19 μm. It has been experimentally demonstrated that the samples from the manufactured kit withstand a pressure of at least 1.5 atm. Keywords: SXR and EUV radiation, thin films, laser plasma, gas target.
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