Technical Physics
To authors
Volumes and Issues
- 2024
- 2023
- 2022
Application of transmission electron microscopy for the study of a functional nanoelement
Prikhodko K E
1,2, Dement'eva M M1
1National Research Center “Kurchatov Institute”, Moscow, Russia
2National Research Nuclear University “MEPhI”, Moscow, Russia
2National Research Nuclear University “MEPhI”, Moscow, Russia
Email: prihodko_ke@nrcki.ru
Using the focused ion beam probe method, cross-section sample of a single functional device of micron dimensions were cut out for STEM and TEM studies. The use of analytical methods of transmission electron microscopy made it possible to obtain accurate data on the geometric parameters of nanoscale functional devices, the phase and elemental composition of functional element material, as well as on the concentration of free electrons at the Fermi level in the nanoelement material. Keywords: Scanning transmission electron microscopy (STEM), high-resolution transmission electron microscopy (HRTEM), NbN thin superconducting films, cryogenic inductance element, electron energy loss spectroscopy (EELS)). DOI: 10.61011/TP.2023.07.56650.67-23
- B.A. Gurovich, K.E. Prikhodko, E.A. Kuleshova, A.Yu Yakubovsky, E.Z. Meilikhov, M.G. Mosthenko. J. Magn. Magn. Mater., 322, 3060 (2010). DOI: 10.1016/j.jmmm.2010.05.029
- W.H. Chang, W.Y. Chen, H.S. Chang, Tung-Po Hsieh, Jen-Inn Chyi, Tzu-Min Hsu. Phys. Rev. Lett., 96 (11), 3 (2006). DOI: 10.1103/PhysRevLett.96.117401
- B.A. Gurovich, K.E. Prikhodko, L.V. Kutuzov, B.V. Goncharov, D.A. Komarov, E.M. Malieva. Physics of the Solid State, 64 (10), 1373 (2022). DOI: 10.21883/PSS.2022.10.54221.47HH
- G. Goltsman, A. Korneev, V. Izbenko, K. Smirnov, P. Kouminov, B. Voronov, N. Kaurova, A. Verevkin, J. Zhang, A. Pearlman, W. Slysz, R. Sobolewski. Nucl. Instruments Methods Phys. Res. Sect. A Accel. Spectrometers, Detect. Assoc. Equip., 520 (1-3), 527 (2004). DOI: 10.1016/j.nima.2003.11.305
- K.K. Likharev. Phys. C Supercond. Its Appl., 482, 6 (2012). DOI: 10.1016/j.physc.2012.05.016
- D.B. Williams, C.B. Carter. Transmission Electron Microscopy: A Textbook for Materials Science (Springer, 2009), DOI: 10.1007/978-1-61779-415-5_23
- L.A. Giannuzzi, F.A. Stevie. Micron., 30 (3), 197 (1999). DOI: 10.1016/S0968-4328(99)00005-0
- C. Li, G. Habler, L.C. Baldwin, R. Abart. Ultramicroscopy, 184, 310 (2018). DOI: 10.1016/j.ultramic.2017.09.011
- M.B. Ward, N.A. Porter, P. Sinha, R. Brydson, C.H. Marrows. J. Phys. Conf. Ser. 522, 012044 (2014). DOI: 10.1088/1742-6596/522/1/012044
- A. Abud, E. Coletto, S. Oliveira. et al. Microscopy Microanalysis, 16, 6 (2010). DOI: 10.1017/S14319276100
- D.A.M. de Winter, C. Hsieh, M. Marko M.F. Hayles. J. Microsc., 281, (2), 125 (2021). DOI: 10.1111/jmi.12943
- H. Ho, K. Gray, R. Kampwirth, et al. J. Mater. Sci., 21, 4097 (1986)
- R. Schneider, B. Freitag, D. Gerthsen, K.S. Ilin, M. Siegel. Cryst. Res. Technol., 44 (10) 1115 (2009). DOI: 10.1002/crat.200900462
- K.E. Prikhodko, B.A. Gurovich, M.M. Dement'eva. IOP Conference Series: Materials Science and Engineering, 130, 012046 (2016). DOI: 10.1088/1757-899X/130/1/012046
- D.I. Dolgii, E.D. Ol'shanskii, E.P. Ryazantsev. Konvers. Mashinostr., 3-4, 119 (1999) (in Russian)
- K.E. Prikhodko, M.M. Dementyeva, B.A. Gurovich, D.A. Komarov, L.V. Kutuzov. Crystallogr. Rep., 63 (2), 241 (2018). DOI: 10.7868/S0023476118020169
Подсчитывается количество просмотров абстрактов ("html" на диаграммах) и полных версий статей ("pdf"). Просмотры с одинаковых IP-адресов засчитываются, если происходят с интервалом не менее 2-х часов.
Дата начала обработки статистических данных - 27 января 2016 г.