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Home » Technical Physics » Year 2023, issue 7 » Article p. 805
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The theory of axial tomography based on the inverse Radon transform for high-aperture soft X-ray microscopy
Russian version
DOI: 10.61011/TP.2023.07.56620.106-23
Gaikovich K.P.1, Malyshev I.V.1, Reunov D.G.1, Chkhalo N.I.1
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
Email: ilya-malyshev@ipmras.ru
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For soft X-ray microscopy in the approximation of geometrical optics, a theoretical model for the formation of the received image is constructed - a relationship is found between the image recorded on the detector and the 3D distribution of the sample absorption index using a high-aperture mirror objective (NA > 0.3) with a focus depth close to the diffraction limit. The solution of the inverse problem of tomography for determining this 3D distribution from the data of measurements in a high-aperture mirror SXR-microscope is obtained. Keywords: soft x-ray microscopy, inverse problem of microscopy, absorption contrast imaging. DOI: 10.61011/TP.2023.07.56620.106-23
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