Technical Physics
To authors
Calculation of the component composition of the surface layers of titanium carbide sputtered with light ions
Manukhin V.V.
1
1National Research University «Moscow Power Engineering Institute», Moscow, Russia
Email: ManukhinVV@mpei.ru
On the basis of the previously tested model of sputtering binary layered inhomogeneous targets with light ions, a method for calculating the component composition of the surface layers of titanium carbide under stationary (stoichiometric) sputtering with light ions is proposed. The results of calculations of the component composition of the altered surface layer of titanium carbide are given in comparison with experimental data and the results of computer simulation. The proposed method for calculating the component composition based on the model of sputtering binary layered inhomogeneous targets made it possible to estimate the thickness of the changed surface layer. The proposed calculation method allows developing a technology for creating titanium carbide surfaces with a given ratio of components. Keywords: modified surface, layered-heterogeneous surfaces, titanium carbide, partial sputtering coefficient, stationary (stoichiometric) sputtering. DOI: 10.61011/TP.2023.06.56533.52-23
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