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Creation of functional nanostructures under ion irradiation
Prikhodko K. E.
1,2, Dementyeva M. M.
1
1National Research Center “Kurchatov Institute”, Moscow, Russia
2National Research Nuclear University “MEPhI”, Moscow, Russia
2National Research Nuclear University “MEPhI”, Moscow, Russia
Email: prihodko_ke@nrcki.ru, dementyeva_mm@nrcki.ru
The paper describes a method developed in National Research Centre "Kurchatov Institute" for creating different functional nanostructures using ion beam irradiation. As an example, the formation of an integrated resistive elements in a low-temperature NbN superconductor nanowire is demonstrated. The possibility of producing an insulating layer of aluminum oxide with a thickness of 15 nm on the aluminum surface at room temperature under 0.2 keV oxygen ions irradiation was shown. Keywords: Ion irradiation, NbN thin superconducting films, integrated cryogenic resistors, creation of dielectric layers under irradiation.
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