Optical properties of a-SiC:H/Ag/c-Si composite structure
Prigoda K.V. 1, Bolshakov V.O. 1, Grudinkin S. A. 1, Ermina A. A. 1, Markov D. P. 1, Zharova Yu. A. 1
1Ioffe Institute, St. Petersburg, Russia
Email: kristina_prigoda@mail.ru, vobolshakov@mail.ioffe.ru, Grudink@gvg.ioffe.ru, annaermina@mail.ioffe.ru, danisimyss@gmail.com, piliouguina@mail.ioffe.ru

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Optical properties of the composite structure a-SiC:H/hemispherical Ag nanoparticles/c-Si were studied using spectroscopic ellipsometry and reflectometry. Hemispherical Ag nanoparticles on c-Si were obtained by chemical deposition from an AgNO3+HF solution followed by annealing in ambient atmosphere. A layer of a-SiC:H (~50 nm) was deposited on the surface of hemispherical Ag particles using plasma-enhanced chemical vapor deposition. A sharp dip to almost zero was observed in the reflectance spectrum with s-polarization in the wavelength range from 701 to 717 nm, the magnitude of which depended on the angle of incidence of light on the sample. Keywords: hydrogenated amorphous silicon carbide, hemispherical silver nanoparticles, spectroscopic ellipsometry.
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